產品

空氣軸承

半導體後段切割 Model 2-A
Features
Contents Specification
Input
Air
Condition
Pressure 5.5kgf/㎠ – 6.5kgf/㎠
Temperature 20℃
Filter 0.5 ~ 1.0㎛
Air Consumption 25ℓ/min
Cooling
Fluid
Class Water or oil
Pressure 3kgf/㎠
Cooling Flow Rate 2ℓ/min
Temperature 17 ~ 19℃
Motor 3phase, 2pole, AC induction, 220V at 833㎐
Rated Speed Range 60,000rpm
Max. Power 2.2㎾
Static Axial Load Min 20kgf
Static Radial Load Min 15kgf
Static Runout 0.5㎛
◈ Use : 6" Wafer Dicing Machines ◈