產品

平面顯示器

RPS, RPSC 設備維修 銷售
Application 光電 / 面板 / 半導體
RPS RPSC RPG 遠端電漿產生器 
維修、維護、中古設備、新品開發

設備
1. 成膜用 RF Generator (RF Plasma Generator、RFG)
2. Matching box (Matcher)
3. Clean 用 RPSC (RPS, Remote Plasma Source)
4. Clean 用 MF Generator, Reactor

廠牌
1. NPP (New Power Plasma)
2. MKS
3. DAIHEN
4. AE
Description RPG (Remote Plasma Generator) installs a plasma source outside in order to reduce the damage to the internal parts and particles, which is the weakness of the existing In-situ approach-based chamber cleaning. It is made of aluminum pipe wall instead of the currently used quarts, ceramic and it is a remote plasma source that can clean the CVD processing chamber by generating safe high-density plasma using a high-pressured gas in high-volume.  

We provided the overhaul service and whole new generator.
Machine NPP, MKS, DAIHEN, AE, AKT, Jusung
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